Capacitively Coupled Atmospheric RF Microplasma Devices
نویسندگان
چکیده
We designed and fabricated planar, four-terminal, atmospheric, capacitively coupled (CC), helium RF micro plasma devices (MPDs). The operational characteristics of the MPDs are investigated. The microplasma field effect transistors (FETs) are fabricated and investigated, showing that the plasma current can be controlled by a gate bias. The stability of the MPDs is tested under harsh conditions of ionizing radiation and high temperature.
منابع مشابه
Effect of power modulation on properties of pulsed capacitively coupled radiofrequency discharges
We describe measurements of plasma properties of pulsed, low pressure, capacitively coupled discharges operated in argon. The research aims to determine the effect of modulating the radiofrequency power during the discharge part of the pulse cycle. Measurements of local electron density and optical emission were made in capacitively-coupled rf discharges generated in a Gaseous Electronics Confe...
متن کاملCharacteristics of Atmospheric Microplasma in Small Discharge Gaps
Emission spectroscopy analysis and imaging technique were used to study the microplasma phenomena. The microplasma discharge in Ar and N2/Ar was analyzed along the discharge gap area and also for specific periods of time during the discharge. Microplasma showed characteristics specific with an atmospheric glow discharge: positive column, Faraday dark space and negative glow. Spatial and tempora...
متن کاملComparison of a fractional microplasma radio frequency technology and carbon dioxide fractional laser for the treatment of atrophic acne scars: a randomized split-face clinical study.
BACKGROUND No studies have compared fractional microplasma radio frequency (RF) technology with the carbon dioxide fractional laser system (CO2 FS) in the treatment of atrophic acne scars in the same patient. OBJECTIVE To compare the efficacy and safety of fractional microplasma RF with CO2 FS in the treatment of atrophic acne scars. METHODS AND MATERIALS Thirty-three Asian patients receive...
متن کاملTitle of Project : Numerical simulation of 2 D capacitively - coupled RF plasma for the synthesis of silicon nanocrystals
Title of Project: Numerical simulation of 2D capacitively-coupled RF plasma for the synthesis of silicon nanocrystals Name: Romain Le Picard and Carlos Larriba Institution: University of Minnesota Email: [email protected], [email protected] Advisor: Steven L. Girshick Advisor email: [email protected] Institution Visited: University of Michigan Host: Mark J. Kushner Host email: [email protected] Dates of...
متن کاملAtmospheric-pressure microplasma in dielectrophoresis-driven bubbles for optical emission spectroscopy.
The manipulation of bubbles and the ignition of microplasma within a 200 nL bubble at atmospheric pressure and in an inert silicone oil environment were achieved. Driven by dielectrophoresis (DEP), bubble generation, transportation, mixing, splitting, and expelling were demonstrated. This process facilitated the preparation of various bubbles with tuneable gas compositions. Different gas bubble...
متن کامل